%0 Conference Paper %1 conf/aspdac/IkenoMIKIA13 %A Ikeno, Rimon %A Maruyama, Takashi %A Iizuka, Tetsuya %A Komatsu, Satoshi %A Ikeda, Makoto %A Asada, Kunihiro %B ASP-DAC %D 2013 %I IEEE %K dblp %P 255-260 %T High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design. %U http://dblp.uni-trier.de/db/conf/aspdac/aspdac2013.html#IkenoMIKIA13 %@ 978-1-4673-3029-9

@inproceedings{conf/aspdac/IkenoMIKIA13, added-at = {2017-05-26T00:00:00.000+0200}, author = {Ikeno, Rimon and Maruyama, Takashi and Iizuka, Tetsuya and Komatsu, Satoshi and Ikeda, Makoto and Asada, Kunihiro}, biburl = {https://www.bibsonomy.org/bibtex/2cbc107b63edd890f8a5d12a0f5cd042f/dblp}, booktitle = {ASP-DAC}, crossref = {conf/aspdac/2013}, ee = {https://doi.org/10.1109/ASPDAC.2013.6509605}, interhash = {7e985da186f3405ef98fbb25a6b06cfe}, intrahash = {cbc107b63edd890f8a5d12a0f5cd042f}, isbn = {978-1-4673-3029-9}, keywords = {dblp}, pages = {255-260}, publisher = {IEEE}, timestamp = {2019-10-17T16:44:50.000+0200}, title = {High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design.}, url = {http://dblp.uni-trier.de/db/conf/aspdac/aspdac2013.html#IkenoMIKIA13}, year = 2013 }