%0 Journal Article %1 journals/mr/GrunwaldRHCKKSB16 %A Grünwald, Eva %A Rosc, Jördis %A Hammer, René %A Czurratis, Peter %A Koch, Matthias %A Kraft, Jochen %A Schrank, Franz %A Brunner, Roland %D 2016 %J Microelectron. Reliab. %K dblp %P 370-374 %T Automatized failure analysis of tungsten coated TSVs via scanning acoustic microscopy. %U http://dblp.uni-trier.de/db/journals/mr/mr64.html#GrunwaldRHCKKSB16 %V 64

@article{journals/mr/GrunwaldRHCKKSB16, added-at = {2022-03-23T00:00:00.000+0100}, author = {Grünwald, Eva and Rosc, Jördis and Hammer, René and Czurratis, Peter and Koch, Matthias and Kraft, Jochen and Schrank, Franz and Brunner, Roland}, biburl = {https://www.bibsonomy.org/bibtex/2689489a64d2ca94663b0693b1fde5c6c/dblp}, ee = {https://doi.org/10.1016/j.microrel.2016.07.075}, interhash = {2d1fe61b793058cfc0b5bba0f8e80e5a}, intrahash = {689489a64d2ca94663b0693b1fde5c6c}, journal = {Microelectron. Reliab.}, keywords = {dblp}, pages = {370-374}, timestamp = {2024-04-09T02:49:20.000+0200}, title = {Automatized failure analysis of tungsten coated TSVs via scanning acoustic microscopy.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr64.html#GrunwaldRHCKKSB16}, volume = 64, year = 2016 }