MICROSCALE THERMAL BUBBLE FORMATION: THERMOPHYSICAL PHENOMENA AND APPLICATIONS
Nanoscale and Microscale Thermophysical Engineering, 2 (2):
71--85 (1998)DOI: 10.1080/108939598199991
Abstract
This work addresses the thermophysical phenomena of bubble formation by using solid-state microheaters and recommends specific directions for future applications. Microscale bubble formation has become an important actuation mechanism for microfluidic machines in the emerging field of microelectromechanical systems (MEMS). Characterization of microbubble formation mechanisms leads to new scientific research in microscale heat transfer and provides design guidelines for bubble-powered micromachines. A review of theoretical bases describing heat transfer processes of solid-state microheaters is followed by a discussion of the thermophysical phenomena of microbubble nucleation mechanisms. Engineering challenges are illustrated with existing and potential applications including ink-jet printers, microbubble-powered mechanical actuators, microbubble valves, and microbubble pumps.