%0 Conference Paper %1 conf/3dic/CivaleGTTSB10 %A Civale, Yann %A Gonzalez, Marcel %A Tezcan, Deniz Sabuncuoglu %A Travaly, Youssef %A Soussan, Philippe %A Beyne, Eric %B 3DIC %D 2010 %I IEEE %K dblp %P 1-4 %T A novel concept for ultra-low capacitance via-last TSV. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2010.html#CivaleGTTSB10 %@ 978-1-4577-0526-7

@inproceedings{conf/3dic/CivaleGTTSB10, added-at = {2021-10-14T00:00:00.000+0200}, author = {Civale, Yann and Gonzalez, Marcel and Tezcan, Deniz Sabuncuoglu and Travaly, Youssef and Soussan, Philippe and Beyne, Eric}, biburl = {https://www.bibsonomy.org/bibtex/2b0dd63b961add0a808f0b34b298808d5/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2010}, ee = {https://doi.org/10.1109/3DIC.2010.5751482}, interhash = {56275f24433efeefd9ab8b094f181536}, intrahash = {b0dd63b961add0a808f0b34b298808d5}, isbn = {978-1-4577-0526-7}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-10T12:11:20.000+0200}, title = {A novel concept for ultra-low capacitance via-last TSV.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2010.html#CivaleGTTSB10}, year = 2010 }