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%0 Thesis
%1 yeh2015fabrication
%A Yeh, Chia-Pin
%D 2015
%K
%T Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
@phdthesis{yeh2015fabrication,
added-at = {2023-12-12T23:37:56.000+0100},
author = {Yeh, Chia-Pin},
biburl = {https://www.bibsonomy.org/bibtex/2b7f36be646bf528e5dc50e0e44113b9e/admin},
dnbtitleid = {1070910929},
interhash = {58233970469b738a5a88b0cd722f2711},
intrahash = {b7f36be646bf528e5dc50e0e44113b9e},
keywords = {},
school = {Uni Magdeburg},
timestamp = {2023-12-12T23:37:56.000+0100},
title = {Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM},
year = 2015
}
