Article,

On Optimization of Doping of a Hetero structure During Manufacturing of P-I-N-Diodes

, and .
International Journal of Computational Science, Information Technology and Control Engineering (IJCSITCE), 2 (3): 17 (July 2015)

Abstract

We introduce an approach of manufacturing of a p-i-n-heterodiodes. The approach based on using a δdoped heterostructure, doping by diffusion or ion implantation of several areas of the heterostructure. After the doping the dopant and/or radiation defects have been annealed. We introduce an approach to optimize annealing of the dopant and/or radiation defects. We determine several conditions to manufacture more compact p-i-n-heterodiodes.

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