Please log in to take part in the discussion (add own reviews or comments).
Cite this publication
More citation styles
- please select -
%0 Book
%1 Campbell1996Science
%A Campbell, Stephen A.
%D 1996
%I Oxford University Press
%K 78a55-optics-electromagnetic-theory-technical-applications electromigration
%T The Science and Engineering of Microelectronic Fabrication
%U http://www.worldcat.org/isbn/0195105087
%@ 0195105087