%0 Journal Article %1 ROB02 %A Robey, S. W. %D 2002 %J Phys.~Rev.~B %K III-V arsenide; desorption; diffusion; etching; gallium modelling process semiconductor semiconductors; sputter structure; surface topography; %N 11 %P 115306 %T Kinetic instabilities during plasma etching of GaAs(001) %V 65

@article{ROB02, added-at = {2009-03-03T17:19:04.000+0100}, author = {Robey, S. W.}, biburl = {https://www.bibsonomy.org/bibtex/28e7d05b2e4865dbce177384854148c48/bronckobuster}, eid = {115306}, interhash = {c890e12ef11a6490f7ba729da6c20921}, intrahash = {8e7d05b2e4865dbce177384854148c48}, journal = {Phys.~Rev.~B}, keywords = {III-V arsenide; desorption; diffusion; etching; gallium modelling process semiconductor semiconductors; sputter structure; surface topography;}, nota = {RK:}, number = 11, numpages = {4}, pages = 115306, timestamp = {2009-03-03T17:19:36.000+0100}, title = {Kinetic instabilities during plasma etching of GaAs(001)}, volume = 65, year = 2002 }