%0 Journal Article %1 TABE1980L403 %A Tabe, Michiharu %A Arai, Kunihiro %A Nakamura, Hiroaki %D 1980 %J Surface Science %K 7×7 leed si(111) %N 3 %P L403 - L409 %R https://doi.org/10.1016/0039-6028(80)90544-0 %T Persistence of Si(111)7 × 7 surface structure under air exposure %U http://www.sciencedirect.com/science/article/pii/0039602880905440 %V 99 %X Changes in Si(111) 7 × 7 pattern with air exposure are studied by RHEED. The relation between exposure time and air-oxidized film thickness is obtained using an ellipsometer. As a result, it is found that the 7 × 7 surface after air exposure (760 Torr, 20 h) still exhibits several 7 × 7 spots near normal ones in the RHEED pattern. The air-oxidized film thickness corresponding to this exposure is about 13 Å. The fact that the 7 × 7 spots do not disappear with HF etching of the oxide film indicates that the superstructure remains not at the oxide surface but at the substrate selvedge. The 7 × 7 spots gradually disappear after longer exposure time and no 7 × 7 spots can be observed after 40 h (about 15 Å in oxide thickness). For a sample exposed longer than 40 h, no 7 × 7 spots reappear, even if the oxide is removed by HF. Therefore, it is concluded that the structure of the substrate selvedge changes with exposure time.

@article{TABE1980L403, abstract = {Changes in Si(111) 7 × 7 pattern with air exposure are studied by RHEED. The relation between exposure time and air-oxidized film thickness is obtained using an ellipsometer. As a result, it is found that the 7 × 7 surface after air exposure (760 Torr, 20 h) still exhibits several 7 × 7 spots near normal ones in the RHEED pattern. The air-oxidized film thickness corresponding to this exposure is about 13 Å. The fact that the 7 × 7 spots do not disappear with HF etching of the oxide film indicates that the superstructure remains not at the oxide surface but at the substrate selvedge. The 7 × 7 spots gradually disappear after longer exposure time and no 7 × 7 spots can be observed after 40 h (about 15 Å in oxide thickness). For a sample exposed longer than 40 h, no 7 × 7 spots reappear, even if the oxide is removed by HF. Therefore, it is concluded that the structure of the substrate selvedge changes with exposure time.}, added-at = {2018-01-29T17:22:20.000+0100}, author = {Tabe, Michiharu and Arai, Kunihiro and Nakamura, Hiroaki}, biburl = {https://www.bibsonomy.org/bibtex/2b6e74acce8776e5090f9b15b43c4e056/maarten.leiden}, description = {Persistence of Si(111)7 × 7 surface structure under air exposure - ScienceDirect}, doi = {https://doi.org/10.1016/0039-6028(80)90544-0}, interhash = {cce4a2dcb3d826c1c4965eff67bc87cf}, intrahash = {b6e74acce8776e5090f9b15b43c4e056}, issn = {0039-6028}, journal = {Surface Science}, keywords = {7×7 leed si(111)}, number = 3, pages = {L403 - L409}, timestamp = {2018-01-29T17:22:20.000+0100}, title = {Persistence of Si(111)7 × 7 surface structure under air exposure}, url = {http://www.sciencedirect.com/science/article/pii/0039602880905440}, volume = 99, year = 1980 }