Abstract
Electrothermal responses of attached and suspended lineshape microstructures fabricated by surface micromachining are investigated. A three-dimensional electrothermal model has been established. This model is based on an axial, one-dimensional electrothermal analysis and a heat-conduction shape factor that represents heat transfer perpendicular to the axial direction. Experimental devices have been built by the surface-micromachining process and a 2 μm gap is constructed for suspended microstructures. Electrical power is passed through these microstructures to characterize the electrothermal responses. Bubble-formation experiments which use local electrical heating to generate micro thermal bubbles in a working liquid have been tested by using these microstructures and the experimental results are consistent with the theoretical model.
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