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A temperature-to-digital converter for a MEMS-based programmable oscillator with better than ±0.5ppm frequency stability., , , , , , , , , and 3 other author(s). ISSCC, page 206-208. IEEE, (2012)Session 22 overview: Sensors & displays., and . ISSCC, page 378-379. IEEE, (2013)A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With < ±0.5-ppm Frequency Stability and < 1-ps Integrated Jitter., , , , , , , , , and 3 other author(s). IEEE J. Solid State Circuits, 48 (1): 276-291 (2013)Silicon MEMS Oscillators for High-Speed Digital Systems., and . IEEE Micro, 30 (2): 80-89 (2010)F5: Frequency generation and clock distribution., , , , , , , and . ISSCC, page 508-509. IEEE, (2013)Silicon MEMS oscillators for high speed digital systems., and . Hot Chips Symposium, page 1-25. IEEE, (2009)A MEMS-Assisted Temperature Sensor With 20-µK Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2., , , , , , , , , and 5 other author(s). IEEE J. Solid State Circuits, 52 (1): 185-197 (2017)A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator., , , , , , , , , and 7 other author(s). IEEE J. Solid State Circuits, 50 (1): 291-302 (2015)An integrated controller for tunnel sensors., , , , , , and . IEEE J. Solid State Circuits, 34 (8): 1099-1107 (1999)11.1 Dual-MEMS-resonator temperature-to-digital converter with 40 K resolution and FOM of 0.12pJK2., , , , , , , , , and 4 other author(s). ISSCC, page 200-201. IEEE, (2016)