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A study of deposition conditions on charging properties of PECVD silicon nitride films for MEMS capacitive switches., , , and . Microelectron. Reliab., 54 (9-10): 2159-2163 (2014)An in depth analysis of pull-up capacitance-voltage characteristic for dielectric charging assessment of MEMS capacitive switches., , , and . Microelectron. Reliab., (2016)Determination of bulk discharge current in the dielectric film of MEMS capacitive switches., and . Microelectron. Reliab., 51 (9-11): 1874-1877 (2011)An experimental study of the thermally activated processes in polycrystalline silicon thin film transistors., , , , and . Microelectron. Reliab., 47 (12): 2058-2064 (2007)On the defects introduced by AC and DC hot carrier stress in SOI PD MOSFETs., , , , and . Microelectron. Reliab., 44 (9-11): 1643-1647 (2004)Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches., , , , , , , and . Microelectron. Reliab., 48 (8-9): 1232-1236 (2008)Properties of contactless and contacted charging in MEMS capacitive switches., , , , , , , and . Microelectron. Reliab., 53 (9-11): 1655-1658 (2013)Performance and reliability of SLS ELA polysilicon TFTs fabricated with novel crystallization techniques., , , , and . Microelectron. Reliab., 47 (9-11): 1378-1383 (2007)Alpha particle radiation effects in RF MEMS capacitive switches., , , , , , , and . Microelectron. Reliab., 48 (8-9): 1241-1244 (2008)ESD failure signature in capacitive RF MEMS switches., , , , , , and . Microelectron. Reliab., 48 (8-9): 1237-1240 (2008)