%0 Thesis %1 schroder2000modell %A Schröder, Henning %D 2000 %K %T Modell des anisotropen Ätzens von einkristallinem Silizium in wäßrigen KOH-Lösungen

@phdthesis{schroder2000modell, added-at = {2023-12-12T17:33:08.000+0100}, author = {Schröder, Henning}, biburl = {https://www.bibsonomy.org/bibtex/26528ba6199c7a6d3fa20fc348e04017a/admin}, dnbtitleid = {958560765}, interhash = {0555636f12ef32b5c96fb65c8f6384e7}, intrahash = {6528ba6199c7a6d3fa20fc348e04017a}, keywords = {}, school = {TU Berlin}, timestamp = {2023-12-12T17:33:08.000+0100}, title = {Modell des anisotropen Ätzens von einkristallinem Silizium in wäßrigen KOH-Lösungen}, year = 2000 }