Abstract
We generalize a two-dimensional dynamic percolation model of dielectric
breakdown of the SiO2 in metal-oxide-semiconductor capacitors to include
the effect of device area and oxide defect concentration. The strategy
allows for dielectric breakdown to start in several points (seeds) of
the Si/SiO2 interface. The results which arise for the behavior of the
time to dielectric breakdown (t(BD)) with area, and the effect of the
number of seeds (defects) at the interface allow for an improved
agreement with experimental results. (C) 2002 Elsevier Science B.V. All
rights reserved.
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