%0 Conference Paper %1 conf/nems/XinPPMF16 %A Xin, Yu %A Pandraud, Gregory %A Pakula, Lukasz S. %A Morana, Bruno %A French, Paddy J. %B NEMS %D 2016 %I IEEE %K dblp %P 549-552 %T Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides. %U http://dblp.uni-trier.de/db/conf/nems/nems2016.html#XinPPMF16 %@ 978-1-5090-1947-2

@inproceedings{conf/nems/XinPPMF16, added-at = {2021-09-23T00:00:00.000+0200}, author = {Xin, Yu and Pandraud, Gregory and Pakula, Lukasz S. and Morana, Bruno and French, Paddy J.}, biburl = {https://www.bibsonomy.org/bibtex/2155d33f04abe2b2233faaae83f159b03/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2016}, ee = {https://doi.org/10.1109/NEMS.2016.7758311}, interhash = {029d7b18547c48d8ad55ce3f29de523f}, intrahash = {155d33f04abe2b2233faaae83f159b03}, isbn = {978-1-5090-1947-2}, keywords = {dblp}, pages = {549-552}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:28.000+0200}, title = {Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2016.html#XinPPMF16}, year = 2016 }