%0 Conference Paper %1 conf/icsai/GuoG19 %A Guo, Qunchao %A Geng, Xinhua %B ICSAI %D 2019 %E Wu, Wanqing %E Wang, Lipo %E Ji, Chunlei %E Chen, Niansheng %E Sun, Qiang %E Song, Xiaoyong %E Wang, Xin %I IEEE %K dblp %P 263-267 %T Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD. %U http://dblp.uni-trier.de/db/conf/icsai/icsai2019.html#GuoG19 %@ 978-1-7281-5256-1

@inproceedings{conf/icsai/GuoG19, added-at = {2020-03-09T00:00:00.000+0100}, author = {Guo, Qunchao and Geng, Xinhua}, biburl = {https://www.bibsonomy.org/bibtex/22bb8c0cdf7715eb5bea0758fe3ff16a5/dblp}, booktitle = {ICSAI}, crossref = {conf/icsai/2019}, editor = {Wu, Wanqing and Wang, Lipo and Ji, Chunlei and Chen, Niansheng and Sun, Qiang and Song, Xiaoyong and Wang, Xin}, ee = {https://doi.org/10.1109/ICSAI48974.2019.9010228}, interhash = {0b74d3682785022370c9f7661c035a3d}, intrahash = {2bb8c0cdf7715eb5bea0758fe3ff16a5}, isbn = {978-1-7281-5256-1}, keywords = {dblp}, pages = {263-267}, publisher = {IEEE}, timestamp = {2020-03-10T11:45:28.000+0100}, title = {Deposition High Quality P-type Microcrystalline Silicon Thin Films by RF-PECVD.}, url = {http://dblp.uni-trier.de/db/conf/icsai/icsai2019.html#GuoG19}, year = 2019 }