%0 Conference Paper %1 conf/nems/GlacerDTL14 %A Glacer, Christoph %A Dehe, Alfons %A Tumpold, David %A Laur, Rainer %B NEMS %D 2014 %I IEEE %K dblp %P 12-16 %T Silicon microspeaker with out-of-plane displacement. %U http://dblp.uni-trier.de/db/conf/nems/nems2014.html#GlacerDTL14 %@ 978-1-4799-4726-3

@inproceedings{conf/nems/GlacerDTL14, added-at = {2021-08-11T00:00:00.000+0200}, author = {Glacer, Christoph and Dehe, Alfons and Tumpold, David and Laur, Rainer}, biburl = {https://www.bibsonomy.org/bibtex/2c3aaf231f1e9eb74fa2e6cecae600263/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2014}, ee = {https://doi.org/10.1109/NEMS.2014.6908749}, interhash = {0e95ef7b34aab61d581fc6b016923468}, intrahash = {c3aaf231f1e9eb74fa2e6cecae600263}, isbn = {978-1-4799-4726-3}, keywords = {dblp}, pages = {12-16}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:16.000+0200}, title = {Silicon microspeaker with out-of-plane displacement.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2014.html#GlacerDTL14}, year = 2014 }