%0 Conference Paper %1 conf/nems/MiaoSCWHXX15 %A Miao, Jing %A Shen, Wenjiang %A Chen, Muyu %A Wang, Hui %A He, Changde %A Xue, Chenyang %A Xiong, Jijun %B NEMS %D 2015 %I IEEE %K dblp %P 602-604 %T Design and measurement of MEMS capacitive ultrasonic transducer. %U http://dblp.uni-trier.de/db/conf/nems/nems2015.html#MiaoSCWHXX15 %@ 978-1-4673-6695-3

@inproceedings{conf/nems/MiaoSCWHXX15, added-at = {2017-05-17T00:00:00.000+0200}, author = {Miao, Jing and Shen, Wenjiang and Chen, Muyu and Wang, Hui and He, Changde and Xue, Chenyang and Xiong, Jijun}, biburl = {https://www.bibsonomy.org/bibtex/2d6c04792a23aea7a1a9f5378bfe3fc69/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2015}, ee = {https://doi.org/10.1109/NEMS.2015.7147501}, interhash = {163785f7232268d6e59b81d09e4eae59}, intrahash = {d6c04792a23aea7a1a9f5378bfe3fc69}, isbn = {978-1-4673-6695-3}, keywords = {dblp}, pages = {602-604}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:47.000+0200}, title = {Design and measurement of MEMS capacitive ultrasonic transducer.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2015.html#MiaoSCWHXX15}, year = 2015 }