%0 Journal Article %1 WOS:000412532600001 %A Barin, Gabriela B %A Filho, Antonio G Souza %A Barreto, Ledjane S %A Kong, Jing %C 32 AVENUE OF THE AMERICAS, NEW YORK, NY 10013-2473 USA %D 2016 %I CAMBRIDGE UNIV PRESS %J MRS ADVANCES %K imported %N 20 %P 1401-1409 %R 10.1557/adv.2016.202 %T Pre-Patterned CVD Graphene: Insights on ALD deposition parameters and their influence on Al2O3 and graphene layers %V 1 %X Fabrication of graphene nanostructures it is important for both investigating their intrinsic physical properties and applying them into various functional devices. In this work we present a study on atomic layer deposition (ALD) of Al2O3 to produce patterned graphene through area-selective chemical vapor deposition (CVD) growth. A systematic parametric study was conducted to determine how the number of cycles and the purging time affect the morphology and the electrical properties of both graphene and Al2O3 layers.

@article{WOS:000412532600001, abstract = {Fabrication of graphene nanostructures it is important for both investigating their intrinsic physical properties and applying them into various functional devices. In this work we present a study on atomic layer deposition (ALD) of Al2O3 to produce patterned graphene through area-selective chemical vapor deposition (CVD) growth. A systematic parametric study was conducted to determine how the number of cycles and the purging time affect the morphology and the electrical properties of both graphene and Al2O3 layers.}, added-at = {2022-05-23T20:00:14.000+0200}, address = {32 AVENUE OF THE AMERICAS, NEW YORK, NY 10013-2473 USA}, author = {Barin, Gabriela B and Filho, Antonio G Souza and Barreto, Ledjane S and Kong, Jing}, biburl = {https://www.bibsonomy.org/bibtex/2d0deec60d0b69183cdff213906063ddb/ppgfis_ufc_br}, doi = {10.1557/adv.2016.202}, interhash = {21a49c7ef659a04b7da649bebf7a417a}, intrahash = {d0deec60d0b69183cdff213906063ddb}, issn = {2059-8521}, journal = {MRS ADVANCES}, keywords = {imported}, number = 20, pages = {1401-1409}, publisher = {CAMBRIDGE UNIV PRESS}, pubstate = {published}, timestamp = {2022-05-23T20:00:14.000+0200}, title = {Pre-Patterned CVD Graphene: Insights on ALD deposition parameters and their influence on Al2O3 and graphene layers}, tppubtype = {article}, volume = 1, year = 2016 }