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%0 Conference Paper
%1 ieKey
%A Tam, K.
%A Kahng, A. B.
%A He, L.
%A Xiong, J.
%B International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy
%D 2005
%K CMP Interconnect_Design
%P pp. 109-119
%T Design of IC Interconnects with Accurate Modeling of CMP
@inproceedings{ieKey,
added-at = {2008-02-16T22:22:17.000+0100},
author = {Tam, K. and Kahng, A. B. and He, L. and Xiong, J.},
biburl = {https://www.bibsonomy.org/bibtex/228d0e208e00bd170a7fdce046a75ab35/steadycookie},
booktitle = {International Society for Optical Engineering(SPIE)Symposium on Microlithograhpy},
date = {March 2005},
description = {Publications},
interhash = {25d4aa3799cf4cc7215c3d47935a4cf1},
intrahash = {28d0e208e00bd170a7fdce046a75ab35},
keywords = {CMP Interconnect_Design},
pages = {pp. 109-119},
timestamp = {2008-02-16T22:22:18.000+0100},
title = {Design of IC Interconnects with Accurate Modeling of CMP},
year = 2005
}
