Inproceedings,
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP.
G. Murdoch, M. O'Toole, G. Marti, A. Pokhrel, D. Tsvetanova, S. Decoster, S. Kundu, Y. Oniki, A. Thiam, Q. Le, O. Pedreira, A. Lesniewska, G. Martinez-Alanis, S. Park, and Z. Tokei.VLSI Technology and Circuits, page 1-2. IEEE, (2022)
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- conf/vlsit/MurdochOMPTDKOT22
- entry type
- inproceedings
- booktitle
- VLSI Technology and Circuits
- year
- 2022
- pages
- 1-2
- publisher
- IEEE
- crossref
- conf/vlsit/2022
- ee
- https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830150
- isbn
- 978-1-6654-9772-5
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- http://dblp.uni-trier.de/db/conf/vlsit/vlsit2022.html#MurdochOMPTDKOT22
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%1 conf/vlsit/MurdochOMPTDKOT22
%A Murdoch, Gayle
%A O'Toole, Matin
%A Marti, Giulio
%A Pokhrel, Ankit
%A Tsvetanova, Diana
%A Decoster, Stefan
%A Kundu, Shreya
%A Oniki, Yusuke
%A Thiam, Arame
%A Le, Quoc Toan
%A Pedreira, Olalla Varela
%A Lesniewska, Alicja
%A Martinez-Alanis, Gerardo
%A Park, Seongho
%A Tokei, Zsolt
%B VLSI Technology and Circuits
%D 2022
%I IEEE
%K dblp
%P 1-2
%T First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP.
%U http://dblp.uni-trier.de/db/conf/vlsit/vlsit2022.html#MurdochOMPTDKOT22
%@ 978-1-6654-9772-5
@inproceedings{conf/vlsit/MurdochOMPTDKOT22,
added-at = {2023-09-30T00:00:00.000+0200},
author = {Murdoch, Gayle and O'Toole, Matin and Marti, Giulio and Pokhrel, Ankit and Tsvetanova, Diana and Decoster, Stefan and Kundu, Shreya and Oniki, Yusuke and Thiam, Arame and Le, Quoc Toan and Pedreira, Olalla Varela and Lesniewska, Alicja and Martinez-Alanis, Gerardo and Park, Seongho and Tokei, Zsolt},
biburl = {https://www.bibsonomy.org/bibtex/2bb23fb5b622db6bc24bca0f133741516/dblp},
booktitle = {VLSI Technology and Circuits},
crossref = {conf/vlsit/2022},
ee = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830150},
interhash = {2e677755e7590c42d3239591da9185d1},
intrahash = {bb23fb5b622db6bc24bca0f133741516},
isbn = {978-1-6654-9772-5},
keywords = {dblp},
pages = {1-2},
publisher = {IEEE},
timestamp = {2024-04-09T19:13:06.000+0200},
title = {First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP.},
url = {http://dblp.uni-trier.de/db/conf/vlsit/vlsit2022.html#MurdochOMPTDKOT22},
year = 2022
}