%0 Conference Paper %1 conf/vlsit/LiaoASZLNWSY22 %A Liao, Pai-Ying %A Alajlouni, Sami %A Si, Mengwei %A Zhang, Zhuocheng %A Lin, Zehao %A Noh, Jinhyun %A Wilk, Calista %A Shakouri, Ali %A Ye, Peide D. %B VLSI Technology and Circuits %D 2022 %I IEEE %K dblp %P 322-323 %T Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs. %U http://dblp.uni-trier.de/db/conf/vlsit/vlsit2022.html#LiaoASZLNWSY22 %@ 978-1-6654-9772-5

@inproceedings{conf/vlsit/LiaoASZLNWSY22, added-at = {2022-08-04T00:00:00.000+0200}, author = {Liao, Pai-Ying and Alajlouni, Sami and Si, Mengwei and Zhang, Zhuocheng and Lin, Zehao and Noh, Jinhyun and Wilk, Calista and Shakouri, Ali and Ye, Peide D.}, biburl = {https://www.bibsonomy.org/bibtex/2df8ff6aa890ea0d324954c422fdad426/dblp}, booktitle = {VLSI Technology and Circuits}, crossref = {conf/vlsit/2022}, ee = {https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830279}, interhash = {3825437690d4b553fc6e2e39d6fcd49b}, intrahash = {df8ff6aa890ea0d324954c422fdad426}, isbn = {978-1-6654-9772-5}, keywords = {dblp}, pages = {322-323}, publisher = {IEEE}, timestamp = {2024-04-09T19:13:06.000+0200}, title = {Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs.}, url = {http://dblp.uni-trier.de/db/conf/vlsit/vlsit2022.html#LiaoASZLNWSY22}, year = 2022 }