%0 Conference Paper %1 conf/icarcv/LuoY08 %A Luo, Fuyuan %A Yin, Juan %B ICARCV %D 2008 %I IEEE %K dblp %P 1702-1707 %T An optimal scheduling algorithm for the motion control of step and scan lithography. %U http://dblp.uni-trier.de/db/conf/icarcv/icarcv2008.html#LuoY08 %@ 978-1-4244-2286-9

@inproceedings{conf/icarcv/LuoY08, added-at = {2017-05-23T00:00:00.000+0200}, author = {Luo, Fuyuan and Yin, Juan}, biburl = {https://www.bibsonomy.org/bibtex/2f42c7d3514e34639b3667bbbeea628b9/dblp}, booktitle = {ICARCV}, crossref = {conf/icarcv/2008}, ee = {https://doi.org/10.1109/ICARCV.2008.4795783}, interhash = {46f3cd929dec44c7d216b2e14eb3b8c0}, intrahash = {f42c7d3514e34639b3667bbbeea628b9}, isbn = {978-1-4244-2286-9}, keywords = {dblp}, pages = {1702-1707}, publisher = {IEEE}, timestamp = {2019-10-17T17:38:48.000+0200}, title = {An optimal scheduling algorithm for the motion control of step and scan lithography.}, url = {http://dblp.uni-trier.de/db/conf/icarcv/icarcv2008.html#LuoY08}, year = 2008 }