%0 Journal Article %1 journals/tase/HsuWYFC16 %A Hsu, Shuo-Fu %A Weng, Min-Hang %A Yang, Ru-Yuan %A Fang, Chun-Hsiung %A Chou, Jyh-Horng %D 2016 %J IEEE Trans Autom. Sci. Eng. %K dblp %N 4 %P 1588-1593 %T An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films. %U http://dblp.uni-trier.de/db/journals/tase/tase13.html#HsuWYFC16 %V 13

@article{journals/tase/HsuWYFC16, added-at = {2020-04-02T00:00:00.000+0200}, author = {Hsu, Shuo-Fu and Weng, Min-Hang and Yang, Ru-Yuan and Fang, Chun-Hsiung and Chou, Jyh-Horng}, biburl = {https://www.bibsonomy.org/bibtex/2d057a375bca12461d7dc0cff3fde9e58/dblp}, ee = {https://doi.org/10.1109/TASE.2016.2572223}, interhash = {53ad4b3f1d5daf493a00aa89693d8cc9}, intrahash = {d057a375bca12461d7dc0cff3fde9e58}, journal = {IEEE Trans Autom. Sci. Eng.}, keywords = {dblp}, number = 4, pages = {1588-1593}, timestamp = {2020-04-03T12:02:56.000+0200}, title = {An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films.}, url = {http://dblp.uni-trier.de/db/journals/tase/tase13.html#HsuWYFC16}, volume = 13, year = 2016 }