%0 Conference Paper %1 conf/aimech/HerfstBDWZKS17 %A Herfst, R. W. %A Bijster, R. J. F. %A Dekker, A. %A Wei, J. %A van Zeijl, H. W. %A Kruidhof, R. %A Sadeghian, Hamed %B AIM %D 2017 %I IEEE %K dblp %P 1310-1315 %T Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging. %U http://dblp.uni-trier.de/db/conf/aimech/aim2017.html#HerfstBDWZKS17 %@ 978-1-5090-6000-9

@inproceedings{conf/aimech/HerfstBDWZKS17, added-at = {2019-02-04T00:00:00.000+0100}, author = {Herfst, R. W. and Bijster, R. J. F. and Dekker, A. and Wei, J. and van Zeijl, H. W. and Kruidhof, R. and Sadeghian, Hamed}, biburl = {https://www.bibsonomy.org/bibtex/22376a17a971c56bce1f7967f49652b82/dblp}, booktitle = {AIM}, crossref = {conf/aimech/2017}, ee = {https://doi.org/10.1109/AIM.2017.8014199}, interhash = {5ad024e4f51616a585db825fa899f228}, intrahash = {2376a17a971c56bce1f7967f49652b82}, isbn = {978-1-5090-6000-9}, keywords = {dblp}, pages = {1310-1315}, publisher = {IEEE}, timestamp = {2019-10-17T13:23:50.000+0200}, title = {Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging.}, url = {http://dblp.uni-trier.de/db/conf/aimech/aim2017.html#HerfstBDWZKS17}, year = 2017 }