%0 Conference Paper %1 conf/iecon/LiuDYDS20 %A Liu, Weike %A Ding, Runze %A Yang, Xiaofeng %A Ding, Chenyang %A Shu, Feng %B IECON %D 2020 %I IEEE %K dblp %P 41-46 %T A Parallel Inverse-Model-Based Iterative Learning Control Method for a Master-Slave Wafer Scanner. %U http://dblp.uni-trier.de/db/conf/iecon/iecon2020.html#LiuDYDS20 %@ 978-1-7281-5414-5

@inproceedings{conf/iecon/LiuDYDS20, added-at = {2020-11-23T00:00:00.000+0100}, author = {Liu, Weike and Ding, Runze and Yang, Xiaofeng and Ding, Chenyang and Shu, Feng}, biburl = {https://www.bibsonomy.org/bibtex/2e7ca83a12a006dae6512748a40b35be3/dblp}, booktitle = {IECON}, crossref = {conf/iecon/2020}, ee = {https://doi.org/10.1109/IECON43393.2020.9254477}, interhash = {72214f2e4c4404c5a99051b3b0fd8aec}, intrahash = {e7ca83a12a006dae6512748a40b35be3}, isbn = {978-1-7281-5414-5}, keywords = {dblp}, pages = {41-46}, publisher = {IEEE}, timestamp = {2020-11-24T11:36:57.000+0100}, title = {A Parallel Inverse-Model-Based Iterative Learning Control Method for a Master-Slave Wafer Scanner.}, url = {http://dblp.uni-trier.de/db/conf/iecon/iecon2020.html#LiuDYDS20}, year = 2020 }