%0 Conference Paper %1 conf/nems/MaoYLY09 %A Mao, Xu %A Yang, Zhenchuan %A Li, Zhihong %A Yan, Guizhen %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 506-509 %T The method of prevent footing effect in making SOI micro-mechanical structure. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#MaoYLY09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/MaoYLY09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Mao, Xu and Yang, Zhenchuan and Li, Zhihong and Yan, Guizhen}, biburl = {https://www.bibsonomy.org/bibtex/26fe0d7309c289fbe92db7d98fff61f2f/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068629}, interhash = {809649e53a0d44106d60517cd3b5cb94}, intrahash = {6fe0d7309c289fbe92db7d98fff61f2f}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {506-509}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {The method of prevent footing effect in making SOI micro-mechanical structure.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#MaoYLY09}, year = 2009 }