%0 Thesis %1 theirich1991ionenstrahlsputterdeposition %A Theirich, Detlef %D 1991 %K %T Ionenstrahlsputterdeposition mehrphasiger, mehrkomponentiger Metalltargets

@phdthesis{theirich1991ionenstrahlsputterdeposition, added-at = {2023-12-13T04:06:20.000+0100}, author = {Theirich, Detlef}, biburl = {https://www.bibsonomy.org/bibtex/2a82176c96dc4c377d168646e72607ff7/admin}, dnbtitleid = {910962251}, interhash = {9200d41a432a214e541ba2215529368e}, intrahash = {a82176c96dc4c377d168646e72607ff7}, keywords = {}, school = {Uni Wuppertal}, timestamp = {2023-12-13T04:06:20.000+0100}, title = {Ionenstrahlsputterdeposition mehrphasiger, mehrkomponentiger Metalltargets}, year = 1991 }