%0 Journal Article %1 journals/mj/JiaDLZZZXZXC06 %A Jia, Cuiping %A Dong, Wei %A Liu, Caixia %A Zhang, Xindong %A Zhou, Jingran %A Zhong, Zhicheng %A Xue, Hailin %A Zang, Huidong %A Xu, Baokun %A Chen, Weiyou %D 2006 %J Microelectron. J. %K dblp %N 11 %P 1297-1301 %T Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon. %U http://dblp.uni-trier.de/db/journals/mj/mj37.html#JiaDLZZZXZXC06 %V 37

@article{journals/mj/JiaDLZZZXZXC06, added-at = {2020-02-22T00:00:00.000+0100}, author = {Jia, Cuiping and Dong, Wei and Liu, Caixia and Zhang, Xindong and Zhou, Jingran and Zhong, Zhicheng and Xue, Hailin and Zang, Huidong and Xu, Baokun and Chen, Weiyou}, biburl = {https://www.bibsonomy.org/bibtex/2a60ea270c3ea4f05dbbe19fd3523edc3/dblp}, ee = {https://doi.org/10.1016/j.mejo.2006.07.008}, interhash = {acd739207d4add364b3ac637acff4ff4}, intrahash = {a60ea270c3ea4f05dbbe19fd3523edc3}, journal = {Microelectron. J.}, keywords = {dblp}, number = 11, pages = {1297-1301}, timestamp = {2020-02-25T12:58:42.000+0100}, title = {Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon.}, url = {http://dblp.uni-trier.de/db/journals/mj/mj37.html#JiaDLZZZXZXC06}, volume = 37, year = 2006 }