%0 Conference Paper %1 conf/IEEEisic/BorovicHZLL05 %A Borovic, Bruno %A Hong, C. %A Zhang, Xuming %A Liu, Aiqun %A Lewis, Frank L. %B ISIC %D 2005 %I IEEE %K dblp %P 982-988 %T Open vs. Closed-Loop Control of the MEMS Electrostatic Comb Drive. %U http://dblp.uni-trier.de/db/conf/IEEEisic/isic2005.html#BorovicHZLL05 %@ 0-7803-8936-0

@inproceedings{conf/IEEEisic/BorovicHZLL05, added-at = {2024-04-26T00:00:00.000+0200}, author = {Borovic, Bruno and Hong, C. and Zhang, Xuming and Liu, Aiqun and Lewis, Frank L.}, biburl = {https://www.bibsonomy.org/bibtex/24599d27281e30c363526e7780376c804/dblp}, booktitle = {ISIC}, crossref = {conf/IEEEisic/2005}, ee = {https://www.wikidata.org/entity/Q57980055}, interhash = {b8613703d11d32193e4418dd46d9a0dc}, intrahash = {4599d27281e30c363526e7780376c804}, isbn = {0-7803-8936-0}, keywords = {dblp}, pages = {982-988}, publisher = {IEEE}, timestamp = {2024-04-29T07:19:26.000+0200}, title = {Open vs. Closed-Loop Control of the MEMS Electrostatic Comb Drive.}, url = {http://dblp.uni-trier.de/db/conf/IEEEisic/isic2005.html#BorovicHZLL05}, year = 2005 }