%0 Conference Paper %1 conf/nems/ZhangWXC10 %A Zhang, Qiuping %A Wen, Li %A Xiang, Weiwei %A Chu, Jiaru %B NEMS %D 2010 %I IEEE %K dblp %P 211-214 %T Fabrication and performance of Microplasma Reactor for maskless scanning plasma etching. %U http://dblp.uni-trier.de/db/conf/nems/nems2010.html#ZhangWXC10 %@ 978-1-4244-6543-9

@inproceedings{conf/nems/ZhangWXC10, added-at = {2017-05-17T00:00:00.000+0200}, author = {Zhang, Qiuping and Wen, Li and Xiang, Weiwei and Chu, Jiaru}, biburl = {https://www.bibsonomy.org/bibtex/206c3b812deda14f7004fad610eb97221/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2010}, ee = {https://doi.org/10.1109/NEMS.2010.5592188}, interhash = {c05b7f1c19f033a07e52ff7f63fdf81c}, intrahash = {06c3b812deda14f7004fad610eb97221}, isbn = {978-1-4244-6543-9}, keywords = {dblp}, pages = {211-214}, publisher = {IEEE}, timestamp = {2019-10-17T22:14:14.000+0200}, title = {Fabrication and performance of Microplasma Reactor for maskless scanning plasma etching.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2010.html#ZhangWXC10}, year = 2010 }