%0 Conference Paper %1 conf/dac/Du0SSLMW13 %A Du, Yuelin %A Ma, Qiang %A Song, Hua %A Shiely, James P. %A Luk-Pat, Gerard %A Miloslavsky, Alexander %A Wong, Martin D. F. %B DAC %D 2013 %I ACM %K dblp %P 93:1-93:6 %T Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography. %U http://dblp.uni-trier.de/db/conf/dac/dac2013.html#Du0SSLMW13 %@ 978-1-4503-2071-9

@inproceedings{conf/dac/Du0SSLMW13, added-at = {2022-10-02T00:00:00.000+0200}, author = {Du, Yuelin and Ma, Qiang and Song, Hua and Shiely, James P. and Luk-Pat, Gerard and Miloslavsky, Alexander and Wong, Martin D. F.}, biburl = {https://www.bibsonomy.org/bibtex/24787d75836ba45e1e1fe1dc583a0773b/dblp}, booktitle = {DAC}, crossref = {conf/dac/2013}, ee = {https://doi.org/10.1145/2463209.2488848}, interhash = {c49378a2c8c947f0567767733b590a8a}, intrahash = {4787d75836ba45e1e1fe1dc583a0773b}, isbn = {978-1-4503-2071-9}, keywords = {dblp}, pages = {93:1-93:6}, publisher = {ACM}, timestamp = {2024-04-10T06:55:15.000+0200}, title = {Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography.}, url = {http://dblp.uni-trier.de/db/conf/dac/dac2013.html#Du0SSLMW13}, year = 2013 }