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%0 Thesis
%1 stepanov2010absolute
%A Stepanov, Sergey
%D 2010
%K
%T Absolute number density and kinetic analysis of CF, CF_1tn2 and C_1tn2F_1tn4 molecules in pulsed CF_tn4/H_1tn2 rf plasmas
@phdthesis{stepanov2010absolute,
added-at = {2023-12-13T09:05:09.000+0100},
author = {Stepanov, Sergey},
biburl = {https://www.bibsonomy.org/bibtex/2934491b3a5fceac7db00cb892619c2b9/admin},
dnbtitleid = {100809756X},
interhash = {cacda2fcf6e6589b8097161f8a0f8c0b},
intrahash = {934491b3a5fceac7db00cb892619c2b9},
keywords = {},
school = {Uni Greifswald},
timestamp = {2023-12-13T09:05:09.000+0100},
title = {Absolute number density and kinetic analysis of CF, CF_1tn2 and C_1tn2F_1tn4 molecules in pulsed CF_tn4/H_1tn2 rf plasmas},
year = 2010
}
