%0 Journal Article %1 journals/tcad/YaoZHLXZXL23 %A Yao, Wenze %A Zhao, Haojie %A Hou, Chengyang %A Liu, Wei %A Xu, Hongcheng %A Zhang, Xin %A Xiao, Jing %A Liu, Jie %D 2023 %J IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. %K dblp %N 1 %P 218-228 %T Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography. %U http://dblp.uni-trier.de/db/journals/tcad/tcad42.html#YaoZHLXZXL23 %V 42

@article{journals/tcad/YaoZHLXZXL23, added-at = {2023-01-15T00:00:00.000+0100}, author = {Yao, Wenze and Zhao, Haojie and Hou, Chengyang and Liu, Wei and Xu, Hongcheng and Zhang, Xin and Xiao, Jing and Liu, Jie}, biburl = {https://www.bibsonomy.org/bibtex/24f3b164b9635abd62eeb4f00f0c7b223/dblp}, ee = {https://doi.org/10.1109/TCAD.2022.3171441}, interhash = {ce9122dd5a3d1ec96c99bfef184782e8}, intrahash = {4f3b164b9635abd62eeb4f00f0c7b223}, journal = {IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.}, keywords = {dblp}, number = 1, pages = {218-228}, timestamp = {2024-04-08T19:45:45.000+0200}, title = {Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography.}, url = {http://dblp.uni-trier.de/db/journals/tcad/tcad42.html#YaoZHLXZXL23}, volume = 42, year = 2023 }