%0 Conference Paper %1 conf/nems/YamaneKSTSMM16 %A Yamane, Daisuke %A Konishi, Toshifumi %A Safu, Teruaki %A Toshiyoshi, Hiroshi %A Sone, Masato %A Masu, Kazuya %A Machida, Katsuyuki %B NEMS %D 2016 %I IEEE %K dblp %P 419-422 %T A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. %U http://dblp.uni-trier.de/db/conf/nems/nems2016.html#YamaneKSTSMM16 %@ 978-1-5090-1947-2

@inproceedings{conf/nems/YamaneKSTSMM16, added-at = {2021-09-23T00:00:00.000+0200}, author = {Yamane, Daisuke and Konishi, Toshifumi and Safu, Teruaki and Toshiyoshi, Hiroshi and Sone, Masato and Masu, Kazuya and Machida, Katsuyuki}, biburl = {https://www.bibsonomy.org/bibtex/2b66efcfd55f4b01e8174c510ef02972c/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2016}, ee = {https://doi.org/10.1109/NEMS.2016.7758281}, interhash = {da3db7ba26bbc2cb5f9b63fe3f5c7074}, intrahash = {b66efcfd55f4b01e8174c510ef02972c}, isbn = {978-1-5090-1947-2}, keywords = {dblp}, pages = {419-422}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:28.000+0200}, title = {A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2016.html#YamaneKSTSMM16}, year = 2016 }