%0 Conference Paper %1 conf/3dic/SumitaTKTTT19 %A Sumita, Kei %A Takeyasu, Jun %A Kato, Kimihiko %A Toprasertpong, Kasidit %A Takenaka, Mitsuru %A Takagi, Shinichi %B 3DIC %D 2019 %I IEEE %K dblp %P 1-2 %T Fabrication of High Quality InAs-on-Lnsulator Structures by Smart Cut Process with Reuse of InAs Wafers. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2019.html#SumitaTKTTT19 %@ 978-1-7281-4870-0

@inproceedings{conf/3dic/SumitaTKTTT19, added-at = {2021-07-25T00:00:00.000+0200}, author = {Sumita, Kei and Takeyasu, Jun and Kato, Kimihiko and Toprasertpong, Kasidit and Takenaka, Mitsuru and Takagi, Shinichi}, biburl = {https://www.bibsonomy.org/bibtex/25661f3b7302c87dc99ec92b1d200e5fc/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2019}, ee = {https://doi.org/10.1109/3DIC48104.2019.9058839}, interhash = {f52d256015fde00cff74a445982ffc57}, intrahash = {5661f3b7302c87dc99ec92b1d200e5fc}, isbn = {978-1-7281-4870-0}, keywords = {dblp}, pages = {1-2}, publisher = {IEEE}, timestamp = {2024-04-10T12:11:03.000+0200}, title = {Fabrication of High Quality InAs-on-Lnsulator Structures by Smart Cut Process with Reuse of InAs Wafers.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2019.html#SumitaTKTTT19}, year = 2019 }