%0 Conference Paper %1 conf/asiasim/HanPCL04 %A Han, Youngshin %A Park, Dongsik %A Chae, Sangwon %A Lee, Chilgee %B AsiaSim %D 2004 %E Baik, Doo-Kwon %I Springer %K dblp %P 514-520 %T Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems). %U http://dblp.uni-trier.de/db/conf/asiasim/asiasim2004.html#HanPCL04 %V 3398 %@ 3-540-24477-8

@inproceedings{conf/asiasim/HanPCL04, added-at = {2017-05-26T00:00:00.000+0200}, author = {Han, Youngshin and Park, Dongsik and Chae, Sangwon and Lee, Chilgee}, biburl = {https://www.bibsonomy.org/bibtex/29ef40f0e086d62a47076ca8801b2fd6d/dblp}, booktitle = {AsiaSim}, crossref = {conf/asiasim/2004}, editor = {Baik, Doo-Kwon}, ee = {https://doi.org/10.1007/978-3-540-30585-9_57}, interhash = {f846efae2a0606b9c70d2517849a208e}, intrahash = {9ef40f0e086d62a47076ca8801b2fd6d}, isbn = {3-540-24477-8}, keywords = {dblp}, pages = {514-520}, publisher = {Springer}, series = {Lecture Notes in Computer Science}, timestamp = {2019-05-15T16:06:00.000+0200}, title = {Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems).}, url = {http://dblp.uni-trier.de/db/conf/asiasim/asiasim2004.html#HanPCL04}, volume = 3398, year = 2004 }