%0 Journal Article %1 journals/mr/YangBASVW08 %A Yang, Yu %A Bender, Hugo %A Arstila, Kai %A Swinnen, Bart %A Verlinden, Bert %A Wolf, Ingrid De %D 2008 %J Microelectron. Reliab. %K dblp %N 8-9 %P 1517-1520 %T Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures. %U http://dblp.uni-trier.de/db/journals/mr/mr48.html#YangBASVW08 %V 48

@article{journals/mr/YangBASVW08, added-at = {2022-03-16T00:00:00.000+0100}, author = {Yang, Yu and Bender, Hugo and Arstila, Kai and Swinnen, Bart and Verlinden, Bert and Wolf, Ingrid De}, biburl = {https://www.bibsonomy.org/bibtex/2f8bfe4038e0c4bb201d3b186550d2df9/dblp}, ee = {https://www.wikidata.org/entity/Q110946402}, interhash = {f89ae27f23ab2c79b586175ced36d16f}, intrahash = {f8bfe4038e0c4bb201d3b186550d2df9}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {8-9}, pages = {1517-1520}, timestamp = {2024-04-09T02:49:20.000+0200}, title = {Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr48.html#YangBASVW08}, volume = 48, year = 2008 }