%0 Conference Paper %1 conf/irps/KimJCCCCLPBU22 %A Kim, Seongkyung %A Jung, Ukjin %A Choo, Seungjin %A Choi, Kihyun %A Chung, Tae-Jin %A Chung, Shin-Young %A Lee, Euncheol %A Park, Juhun %A Bae, Deokhan %A Um, Myungyoon %B IRPS %D 2022 %I IEEE %K dblp %P 11 %T Middle-of-the-Line Reliability Characterization of Recessed-Diffusion-Contact Adopted sub-5nm Logic Technology. %U http://dblp.uni-trier.de/db/conf/irps/irps2022.html#KimJCCCCLPBU22 %@ 978-1-6654-7950-9

@inproceedings{conf/irps/KimJCCCCLPBU22, added-at = {2022-05-09T00:00:00.000+0200}, author = {Kim, Seongkyung and Jung, Ukjin and Choo, Seungjin and Choi, Kihyun and Chung, Tae-Jin and Chung, Shin-Young and Lee, Euncheol and Park, Juhun and Bae, Deokhan and Um, Myungyoon}, biburl = {https://www.bibsonomy.org/bibtex/25d698e0cc38931f670799c1abbb46f52/dblp}, booktitle = {IRPS}, crossref = {conf/irps/2022}, ee = {https://doi.org/10.1109/IRPS48227.2022.9764599}, interhash = {fda1fceef6e5b43e7a6f2325d4869750}, intrahash = {5d698e0cc38931f670799c1abbb46f52}, isbn = {978-1-6654-7950-9}, keywords = {dblp}, pages = 11, publisher = {IEEE}, timestamp = {2024-04-09T12:18:58.000+0200}, title = {Middle-of-the-Line Reliability Characterization of Recessed-Diffusion-Contact Adopted sub-5nm Logic Technology.}, url = {http://dblp.uni-trier.de/db/conf/irps/irps2022.html#KimJCCCCLPBU22}, year = 2022 }