Article,
MEMS technology integrated in the CMOS back end.
R. Gaddi, R. Kampen, A. Unamuno, V. Joshi, D. Lacey, M. Renault, C. Smith, R. Knipe, and D. Yost.Microelectron. Reliab., 50 (9-11): 1593-1598 (2010)
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- 2010
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- Microelectron. Reliab.
- number
- 9-11
- pages
- 1593-1598
- volume
- 50
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- https://doi.org/10.1016/j.microrel.2010.07.113
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%1 journals/mr/GaddiKUJLRSKY10
%A Gaddi, Roberto
%A Kampen, Robertus Petrus Van
%A Unamuno, Anartz
%A Joshi, Vikram
%A Lacey, D.
%A Renault, Mickael
%A Smith, Charles
%A Knipe, Richard
%A Yost, Dennis
%D 2010
%J Microelectron. Reliab.
%K dblp
%N 9-11
%P 1593-1598
%T MEMS technology integrated in the CMOS back end.
%U http://dblp.uni-trier.de/db/journals/mr/mr50.html#GaddiKUJLRSKY10
%V 50
@article{journals/mr/GaddiKUJLRSKY10,
added-at = {2021-08-25T00:00:00.000+0200},
author = {Gaddi, Roberto and Kampen, Robertus Petrus Van and Unamuno, Anartz and Joshi, Vikram and Lacey, D. and Renault, Mickael and Smith, Charles and Knipe, Richard and Yost, Dennis},
biburl = {https://www.bibsonomy.org/bibtex/202bd62e83bc6167724c2c3eaa132936e/dblp},
ee = {https://doi.org/10.1016/j.microrel.2010.07.113},
interhash = {feb0049c441bcfb21d88a759572651c3},
intrahash = {02bd62e83bc6167724c2c3eaa132936e},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = {9-11},
pages = {1593-1598},
timestamp = {2024-04-09T02:49:06.000+0200},
title = {MEMS technology integrated in the CMOS back end.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr50.html#GaddiKUJLRSKY10},
volume = 50,
year = 2010
}