Abstract Polycrystalline films have wide variety of applications in
which their grain structures affect their performance and reliability.
Thin film growth techniques and growth conditions affect grain shapes,
the distribution of grain sizes, and the distribution of the crystallographic
orientations of grains. Variations in these structural properties
are affected by the conditions under which grain nucleation, growth,
coarsening, coalescence, and thickening occur. General trends in
structural evolution in polycystalline films, as a function of processing
conditions and materials class, are discussed in terms of these fundamental
kinetic processes.
%0 Journal Article
%1 Thompson2000
%A Thompson, C. V.
%D 2000
%J Annual Review of Materials Science
%K imported
%P 159--190
%R doi:10.1146/annurev.matsci.30.1.159
%T STRUCTURE EVOLUTION DURING PROCESSING OF POLYCRYSTALLINE FILMS
%V 30
%X Abstract Polycrystalline films have wide variety of applications in
which their grain structures affect their performance and reliability.
Thin film growth techniques and growth conditions affect grain shapes,
the distribution of grain sizes, and the distribution of the crystallographic
orientations of grains. Variations in these structural properties
are affected by the conditions under which grain nucleation, growth,
coarsening, coalescence, and thickening occur. General trends in
structural evolution in polycystalline films, as a function of processing
conditions and materials class, are discussed in terms of these fundamental
kinetic processes.
@article{Thompson2000,
abstract = {Abstract Polycrystalline films have wide variety of applications in
which their grain structures affect their performance and reliability.
Thin film growth techniques and growth conditions affect grain shapes,
the distribution of grain sizes, and the distribution of the crystallographic
orientations of grains. Variations in these structural properties
are affected by the conditions under which grain nucleation, growth,
coarsening, coalescence, and thickening occur. General trends in
structural evolution in polycystalline films, as a function of processing
conditions and materials class, are discussed in terms of these fundamental
kinetic processes.},
added-at = {2009-11-05T12:01:24.000+0100},
author = {Thompson, C. V.},
biburl = {https://www.bibsonomy.org/bibtex/220d1714579b4cc9e918985d60502a450/ghuot},
doi = {doi:10.1146/annurev.matsci.30.1.159},
file = {Thompson2000.pdf:cvd\\Thompson2000.pdf:PDF},
institution = {Department of Materials Science and Engineering, Massachusetts Institute
of Technology, Cambridge, Massachusetts 02139},
interhash = {499629290a3c3577cf7bd806d8a8960a},
intrahash = {20d1714579b4cc9e918985d60502a450},
journal = {Annual Review of Materials Science},
keywords = {imported},
owner = {Guillaume},
pages = {159--190},
timestamp = {2009-11-05T12:01:35.000+0100},
title = {STRUCTURE EVOLUTION DURING PROCESSING OF POLYCRYSTALLINE FILMS},
volume = 30,
year = 2000
}