%0 Journal Article %1 journals/corr/abs-2404-05862 %A Chen, Ying-Lin %A Deforce, Jacob %A Ridder, Vic De %A Dey, Bappaditya %A Blanco, Víctor %A Halder, Sandip %A Leray, Philippe %D 2024 %J CoRR %K dblp %T Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS. %U http://dblp.uni-trier.de/db/journals/corr/corr2404.html#abs-2404-05862 %V abs/2404.05862

@article{journals/corr/abs-2404-05862, added-at = {2024-05-15T00:00:00.000+0200}, author = {Chen, Ying-Lin and Deforce, Jacob and Ridder, Vic De and Dey, Bappaditya and Blanco, Víctor and Halder, Sandip and Leray, Philippe}, biburl = {https://www.bibsonomy.org/bibtex/26b4a094ffd6eb5d94bc3b2ee179492cf/dblp}, ee = {https://doi.org/10.48550/arXiv.2404.05862}, interhash = {22fa925a9addc7955d94fefb17128476}, intrahash = {6b4a094ffd6eb5d94bc3b2ee179492cf}, journal = {CoRR}, keywords = {dblp}, timestamp = {2024-05-20T07:09:50.000+0200}, title = {Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS.}, url = {http://dblp.uni-trier.de/db/journals/corr/corr2404.html#abs-2404-05862}, volume = {abs/2404.05862}, year = 2024 }