%0 Journal Article %1 Sti:CavInt %A Stievater, Todd H. %A Rabinovich, William S. %A Newman, Harvey S. %A Ebel, Jack L. %A Mahon, Rita %A McGee, David J. %A Goetz, Peter G. %D 2003 %J Journal of Microelectromechanical Systems %K imported %P 109-116 %T Microcavity Interferometry for MEMS Device Characterization %V 12 %Z Measure deflection with laser interferometry, resolution 1e-13m

@article{Sti:CavInt, added-at = {2009-07-13T16:53:55.000+0200}, annote = {Measure deflection with laser interferometry, resolution 1e-13m}, author = {Stievater, Todd H. and Rabinovich, William S. and Newman, Harvey S. and Ebel, Jack L. and Mahon, Rita and McGee, David J. and Goetz, Peter G.}, biburl = {https://www.bibsonomy.org/bibtex/2305d54e15ed1cb1be9c8ae50594bb3ea/enodev}, description = {rfmems}, interhash = {393de7704c16fb90fbd128fb089b0e96}, intrahash = {305d54e15ed1cb1be9c8ae50594bb3ea}, journal = {Journal of Microelectromechanical Systems}, keywords = {imported}, month = {February}, pages = {109-116}, timestamp = {2009-07-14T08:40:47.000+0200}, title = {Microcavity Interferometry for MEMS Device Characterization}, volume = 12, year = 2003 }