%0 Book Section %1 askurhekar2012stepheight %A A.S.Kurhekar, P.R.Apte %D 2012 %E IJAET, %K microcantilever micromachining %T Step-Height Measurement Of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry

@inbook{askurhekar2012stepheight, added-at = {2012-01-09T05:01:39.000+0100}, author = {A.S.Kurhekar, P.R.Apte}, biburl = {https://www.bibsonomy.org/bibtex/255afc7722c71dbe735320154c178ada2/askurhekar}, editor = {IJAET}, interhash = {a8eaf8fe6ac24d44b861d3f46fba18f2}, intrahash = {55afc7722c71dbe735320154c178ada2}, keywords = {microcantilever micromachining}, timestamp = {2012-02-17T17:51:46.000+0100}, title = {Step-Height Measurement Of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry}, year = 2012 }