%0 Conference Paper %1 conf/icicdt/GuhlBAWKKRWZSMH21 %A Guhl, Conrad %A Bott, Sascha %A Albayrak, I. Can %A Weitzmann, Anne %A Krause, Robert %A Kappel, Joscha %A Reinhold, Birgit %A Wu, Nan %A Zier, Michael %A Schüring, Andreas %A Ma, Hongwei %A Hüselitz, Rico %A Uhlig, Benjamin %A Wislicenus, Marcus %B ICICDT %D 2021 %I IEEE %K dblp %P 1-4 %T Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2021.html#GuhlBAWKKRWZSMH21 %@ 978-1-6654-4998-4

@inproceedings{conf/icicdt/GuhlBAWKKRWZSMH21, added-at = {2021-12-14T00:00:00.000+0100}, author = {Guhl, Conrad and Bott, Sascha and Albayrak, I. Can and Weitzmann, Anne and Krause, Robert and Kappel, Joscha and Reinhold, Birgit and Wu, Nan and Zier, Michael and Schüring, Andreas and Ma, Hongwei and Hüselitz, Rico and Uhlig, Benjamin and Wislicenus, Marcus}, biburl = {https://www.bibsonomy.org/bibtex/24110d07cd6017f8d72dbdd4588c0be82/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2021}, ee = {https://doi.org/10.1109/ICICDT51558.2021.9626488}, interhash = {28da9f21c93b800d8ebda6958f9c18b9}, intrahash = {4110d07cd6017f8d72dbdd4588c0be82}, isbn = {978-1-6654-4998-4}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-09T22:44:35.000+0200}, title = {Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2021.html#GuhlBAWKKRWZSMH21}, year = 2021 }