A method has been developed to fabricate waveguide-to-waveguide couplers and tapered dielectric rod antennas for the millimeter-wave regime from microetched silicon. A proof-of-concept study shows that the structures can be realized using relatively simple wet etching and robotic process control. Experimental measurements of the waveguide-waveguide couplers agree in key features with simulations. The results indicate that two-stepped tapers perform nearly as well as smooth linear tapers, but are much easier to fabricate. Coupling transmissivity of better than -1 dB, and peak antenna gain of 8-10 dB are indicated at W-band frequencies. Lateral dimension etch control of 5-mum precision was realized. To solve a challenge of controlling the length of the first step, either an improved masking method or a switch to dry etching processes is required.
%0 Journal Article
%1 marconnet2009microfabricated
%A Marconnet, Amy M
%A He, Mike M
%A Sengele, Sean
%A Ho, Sung-Jin
%A Jiang, Hongrui
%A Ferrier, Nicola J
%A Van Der Weide, Daniel W
%A Madhavan, Vidhya
%A Nelson, Natalie
%A Booske, John H
%D 2009
%I IEEE
%J Electron Devices, IEEE Transactions on
%K MillimeterWave Terahertz Waveguides myown
%N 5
%P 721--729
%T Microfabricated Silicon High-Frequency Waveguide Couplers and Antennas
%U http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4808163
%V 56
%X A method has been developed to fabricate waveguide-to-waveguide couplers and tapered dielectric rod antennas for the millimeter-wave regime from microetched silicon. A proof-of-concept study shows that the structures can be realized using relatively simple wet etching and robotic process control. Experimental measurements of the waveguide-waveguide couplers agree in key features with simulations. The results indicate that two-stepped tapers perform nearly as well as smooth linear tapers, but are much easier to fabricate. Coupling transmissivity of better than -1 dB, and peak antenna gain of 8-10 dB are indicated at W-band frequencies. Lateral dimension etch control of 5-mum precision was realized. To solve a challenge of controlling the length of the first step, either an improved masking method or a switch to dry etching processes is required.
@article{marconnet2009microfabricated,
abstract = {A method has been developed to fabricate waveguide-to-waveguide couplers and tapered dielectric rod antennas for the millimeter-wave regime from microetched silicon. A proof-of-concept study shows that the structures can be realized using relatively simple wet etching and robotic process control. Experimental measurements of the waveguide-waveguide couplers agree in key features with simulations. The results indicate that two-stepped tapers perform nearly as well as smooth linear tapers, but are much easier to fabricate. Coupling transmissivity of better than -1 dB, and peak antenna gain of 8-10 dB are indicated at W-band frequencies. Lateral dimension etch control of 5-mum precision was realized. To solve a challenge of controlling the length of the first step, either an improved masking method or a switch to dry etching processes is required.
},
added-at = {2015-04-23T20:58:41.000+0200},
author = {Marconnet, Amy M and He, Mike M and Sengele, Sean and Ho, Sung-Jin and Jiang, Hongrui and Ferrier, Nicola J and Van Der Weide, Daniel W and Madhavan, Vidhya and Nelson, Natalie and Booske, John H},
biburl = {https://www.bibsonomy.org/bibtex/28f6c679e32b3dee35aa3b488c51f830d/tennocrama},
interhash = {d973f04d9669dde39cd136367c1a88e2},
intrahash = {8f6c679e32b3dee35aa3b488c51f830d},
journal = {Electron Devices, IEEE Transactions on},
keywords = {MillimeterWave Terahertz Waveguides myown},
number = 5,
pages = {721--729},
publisher = {IEEE},
timestamp = {2015-04-23T20:58:41.000+0200},
title = {Microfabricated Silicon High-Frequency Waveguide Couplers and Antennas},
url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4808163},
volume = 56,
year = 2009
}