%0 Thesis %1 MATO2009 %A Matoy, Kurt %D 2009 %K imported %T Micro-mechanical characterization of silicon based dielectric films and metal/dielectric interfaces

@phdthesis{MATO2009, added-at = {2013-01-07T16:10:56.000+0100}, author = {Matoy, Kurt}, biburl = {https://www.bibsonomy.org/bibtex/2d9d00834bec1466020823206e5aa804c/olivia.bluder}, interhash = {5092bd7d0e6ffea2c59fb48456cf1ee5}, intrahash = {d9d00834bec1466020823206e5aa804c}, keywords = {imported}, owner = {bluder}, school = {Montanuniversit\"at Leoben}, timestamp = {2013-01-07T16:11:05.000+0100}, title = {Micro-mechanical characterization of silicon based dielectric films and metal/dielectric interfaces}, year = 2009 }