%0 Generic %1 askurhekar2010insitu %A A.S.Kurhekar, %D 2010 %E of ICONSAT2010, Proceedings %K Micro-cantilevers Micromachining %T In-Situ Non-Contact And Contact Precise Measurement of significant Parameters of Surface Micro-Machined Micro-Cantilever

@conference{askurhekar2010insitu, added-at = {2012-02-17T17:46:01.000+0100}, author = {A.S.Kurhekar}, biburl = {https://www.bibsonomy.org/bibtex/2de769ec3a76066a780288cdbb23326da/askurhekar}, editor = {of ICONSAT2010, Proceedings}, interhash = {ec836050c7738f0e15a5abbe2086f5b1}, intrahash = {de769ec3a76066a780288cdbb23326da}, keywords = {Micro-cantilevers Micromachining}, timestamp = {2012-02-17T17:46:01.000+0100}, title = {In-Situ Non-Contact And Contact Precise Measurement of significant Parameters of Surface Micro-Machined Micro-Cantilever}, year = 2010 }