%0 Journal Article %1 6062635 %A Scott, S. %A Kim, J. %A Sadeghi, F. %A Peroulis, D. %D 2012 %J Journal of Microelectromechanical Systems %K 74f05-solid-mechanics-thermal-effects %N 1 %P 161-170 %R 10.1109/JMEMS.2011.2171323 %T An Analytical Capacitance Model of Temperature-Sensitive, Large-Displacement Multimorph Cantilevers: Numerical and Experimental Validation %U https://ieeexplore.ieee.org/document/6062635/ %V 21 %X This paper presents a new experimentally validated analytical capacitance macromodel for microelectromechanical systems large-displacement cantilever beams. The presented model successfully captures 1) the deformed cantilever shape under large-displacement conditions and when the beam is subjected to simultaneous thermal and residual stresses; 2) the electric field and capacitance between the curled beam and an electrode underneath it from room temperature to over 200^°C. All analytical models are verified through finite-element analysis and, for the first time, experimentally validated for deflections over 120 μm and temperatures above 200^°C. We start by extending a multimorph model originally proposed to analyze piezoelectric actuators, to also consider thermal and residual (postfabrication) strains under large-displacement conditions. The model is experimentally validated through measurements conducted on SiO₂/Ti/Au cantilevers fabricated on silicon wafers. The average error between the measured and simulated displacements is less than 4% and 3% at the beam midpoints and tips, respectively, for the entire range of 20-250^°C . Capacitance measurements conducted to over 200^°C show an average deviation from the macromodel of 6.4% over the range of 20-213^°C. The standard deviation for capacitance error is 5.4%, and the maximum error is 15.3%.

@article{6062635, abstract = {This paper presents a new experimentally validated analytical capacitance macromodel for microelectromechanical systems large-displacement cantilever beams. The presented model successfully captures 1) the deformed cantilever shape under large-displacement conditions and when the beam is subjected to simultaneous thermal and residual stresses; 2) the electric field and capacitance between the curled beam and an electrode underneath it from room temperature to over 200^°C. All analytical models are verified through finite-element analysis and, for the first time, experimentally validated for deflections over 120 μm and temperatures above 200^°C. We start by extending a multimorph model originally proposed to analyze piezoelectric actuators, to also consider thermal and residual (postfabrication) strains under large-displacement conditions. The model is experimentally validated through measurements conducted on SiO₂/Ti/Au cantilevers fabricated on silicon wafers. The average error between the measured and simulated displacements is less than 4% and 3% at the beam midpoints and tips, respectively, for the entire range of 20-250^°C . Capacitance measurements conducted to over 200^°C show an average deviation from the macromodel of 6.4% over the range of 20-213^°C. The standard deviation for capacitance error is 5.4%, and the maximum error is 15.3%.}, added-at = {2019-02-28T23:35:52.000+0100}, author = {{Scott}, S. and {Kim}, J. and {Sadeghi}, F. and {Peroulis}, D.}, biburl = {https://www.bibsonomy.org/bibtex/210f121d6c929546a42e8fa93680ec0c2/gdmcbain}, doi = {10.1109/JMEMS.2011.2171323}, interhash = {352e307f24ed5616f943c7c004ac0672}, intrahash = {10f121d6c929546a42e8fa93680ec0c2}, issn = {1057-7157}, journal = {Journal of Microelectromechanical Systems}, keywords = {74f05-solid-mechanics-thermal-effects}, month = feb, number = 1, pages = {161-170}, timestamp = {2019-02-28T23:35:52.000+0100}, title = {An Analytical Capacitance Model of Temperature-Sensitive, Large-Displacement Multimorph Cantilevers: Numerical and Experimental Validation}, url = {https://ieeexplore.ieee.org/document/6062635/}, volume = 21, year = 2012 }