%0 Journal Article %1 journals/mr/NaoeIMEY13 %A Naoe, Takuya %A Ikeuchi, Tamao %A Moritni, Chie %A Endoh, Hirohiko %A Yokoyama, Kohichi %D 2013 %J Microelectron. Reliab. %K dblp %N 12 %P 1829-1840 %T Local damage free Si substrate ultra thinning for backside emission spectral analysis using OBPF for LSI failure mode detection. %U http://dblp.uni-trier.de/db/journals/mr/mr53.html#NaoeIMEY13 %V 53

@article{journals/mr/NaoeIMEY13, added-at = {2020-02-22T00:00:00.000+0100}, author = {Naoe, Takuya and Ikeuchi, Tamao and Moritni, Chie and Endoh, Hirohiko and Yokoyama, Kohichi}, biburl = {https://www.bibsonomy.org/bibtex/25ed843f49eadcb393a4c57115357cfb4/dblp}, ee = {https://doi.org/10.1016/j.microrel.2013.05.013}, interhash = {42afc0e747929cfc7adaa9493e5a7299}, intrahash = {5ed843f49eadcb393a4c57115357cfb4}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = 12, pages = {1829-1840}, timestamp = {2020-02-25T13:23:02.000+0100}, title = {Local damage free Si substrate ultra thinning for backside emission spectral analysis using OBPF for LSI failure mode detection.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr53.html#NaoeIMEY13}, volume = 53, year = 2013 }